Silicon-Quartz Microcapillary Opto-Fluidic Platform Obtained by CMOS-Compatible Die to Wafer 200 mm Dual Bonding Process
نویسندگان
چکیده
منابع مشابه
A CMOS-compatible silicon photonic platform for high-speed integrated opto-electronics
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ژورنال
عنوان ژورنال: Proceedings
سال: 2018
ISSN: 2504-3900
DOI: 10.3390/proceedings2131018